The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2022
Filed:
Feb. 01, 2019
First Sensor Ag, Berlin, DE;
Michael Pierschel, Berlin, DE;
FIRST SENSOR AG, Berlin, DE;
Abstract
Provided is an arrangement for a semiconductor-based pressure sensor chip including: piezoresistive elements which are formed having an electrically doped channel in a layer arrangement in the region of a pressure membrane of a semiconductor substrate; an electrically conductive cover layer which is formed in the layer arrangement and is electrically insulated from the piezoresistive elements by an insulating layer; a bridge circuit of transistors, each of which are formed having one of the piezoresistive elements, wherein gate electrodes of the transistors are arranged in electrically doped layer regions in the electrically conductive cover layer, said layer regions being formed separately from one another; and a signal feedback, using which an output signal applied to the output of the bridge circuit is fed back in a signal-amplifying manner to one or more of the gate electrodes. Also provided is a pressure sensor chip.