The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2022
Filed:
Sep. 12, 2017
Applicant:
Sitime Corporation, Santa Clara, CA (US);
Inventors:
Paul M. Hagelin, Saratoga, CA (US);
Charles I. Grosjean, Los Gatos, CA (US);
Lev Goncharov, St. Petersburg, RU;
Assignee:
SiTime Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 1/14 (2006.01); G01L 1/20 (2006.01); G01L 5/16 (2020.01); G01L 1/14 (2006.01); G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
G01L 5/16 (2013.01); G01L 1/146 (2013.01); G01L 1/205 (2013.01); G01L 9/001 (2013.01);
Abstract
Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of a sensed property, such as regional contact forces, ambient conditions and/or environmental composition. The resonant MEMS sensors generate signals that oscillate at respective frequencies corresponding to the sensed property, increasing or decreasing in frequency in response to an increase or decrease in that property to effect a frequency-modulated digital output.