The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 03, 2022

Filed:

Feb. 20, 2020
Applicant:

Panasonic Intellectual Property Management Co., Ltd., Osaka, JP;

Inventors:

Takashi Kawasaki, Osaka, JP;

Kouhei Takahashi, Osaka, JP;

Naoki Tambo, Osaka, JP;

Yasuyuki Naito, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/06 (2022.01); G01J 5/061 (2022.01); H01L 37/02 (2006.01); G01J 5/20 (2006.01); H01L 35/32 (2006.01); H01L 37/00 (2006.01); G01J 5/08 (2022.01);
U.S. Cl.
CPC ...
G01J 5/061 (2013.01); G01J 5/0853 (2013.01); G01J 5/20 (2013.01); H01L 35/32 (2013.01); H01L 37/00 (2013.01); H01L 37/02 (2013.01); G01J 2005/062 (2013.01);
Abstract

An infrared sensor comprises a base substrate including a recess, a bolometer infrared ray receiver, and a Peltier device. The bolometer infrared ray receiver comprises a resistance variable layer, a bolometer first beam, and a bolometer second beam. The Peltier device comprises a Peltier first beam formed of a p-type semiconductor material and a Peltier second beam formed of an n-type semiconductor material. The Peltier device is in contact with a back surface of the bolometer infrared ray receiver. One end of each of the bolometer first beam, the bolometer second beam, the Peltier first beam, and the Peltier second beam is connected to the base substrate. The bolometer infrared ray receiver and the Peltier device are suspended above the base substrate. Each of the bolometer first beam, the bolometer second beam, the Peltier first beam, and the Peltier second beam has a phononic crystal structure including a plurality of through holes arranged regularly.


Find Patent Forward Citations

Loading…