The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2022
Filed:
Apr. 03, 2020
Imec Vzw, Leuven, BE;
Katholieke Universiteit Leuven, Leuven, BE;
Wouter Jan Westerveld, Oud-Heverlee, BE;
Roelof Jansen, Heverlee, BE;
Xavier Rottenberg, Kessel-Lo, BE;
Veronique Rochus, Embourg, BE;
IMEC VZW, Leuven, BE;
KATHOLIEKE UNIVERSITEIT LEUVEN, Leuven, BE;
Abstract
Embodiments relate to a sensor structure for an acoustical pressure sensor and an opto-mechanical sensor and system that may be used for detecting acoustical pressure waves. Embodiments of a sensor structure for an acoustical pressure sensor include an optical waveguide closed-loop resonator and a plurality of sensor elements. The individual sensor elements of the plurality of sensor elements are configured to be affected by an acoustical pressure wave such that a physical property of the individual sensor element is changed. The optical waveguide closed-loop resonator is arranged at the plurality of sensor elements and associated with each of the individual sensor elements such that a resonance frequency of the optical waveguide closed-loop resonator is shifted due to the affected physical properties of all individual sensor elements. The sensor structure provides a high sensitivity from each sensor element, which is advantageous in e.g. ultrasonic imaging, such as photo-acoustic imaging where the signals typically are low.