The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2022
Filed:
Dec. 03, 2020
Adige S.p.a., Levico Terme, IT;
ADIGE S.p.A., Levico Terme, IT;
Abstract
Method and system for determining separation distance between an object and a processing or measuring tool involve generating a measurement beam of low coherence optical radiation, leading the measurement beam towards the object and the reflected measurement beam towards an optical interferometric sensor assembly in a first direction of incidence, generating a reference beam of low coherence optical radiation, and leading the reference beam towards the optical interferometric sensor assembly in a second direction of incidence, superimposing the measurement and reference beams on a common region of incidence, detecting position of a pattern of interference fringes between the measurement and reference beams on the region of incidence, and determining difference in optical length between a measurement optical path and a reference optical path on position of the pattern of interference fringes along an illumination axis to determine current separation distance between the processing or measuring tool and the object.