The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 03, 2022

Filed:

Sep. 17, 2018
Applicants:

Basf SE, Ludwigshafen am Rhein, DE;

Wayne State University, Detroit, MI (US);

Inventors:

David Dominique Schweinfurth, Ludwigshafen, DE;

Lukas Mayr, Ludwigshafen, DE;

Sinja Verena Klenk, Ludwigshafen, DE;

Sabine Weiguny, Ludwigshafen, DE;

Charles Hartger Winter, Detroit, MI (US);

Kyle Blakeney, Detroit, MI (US);

Nilanka Weerathunga Sirikkathuge, Detroit, MI (US);

Tharindu Malawara Arachchige Nimanthaka Karunaratne, Detroit, MI (US);

Assignees:

BASF SE, Ludwigshafen am Rhein, DE;

Wayne State University, Detroit, MI (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 5/06 (2006.01); C23C 16/12 (2006.01); C23C 16/08 (2006.01); C23C 16/20 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C07F 5/069 (2013.01); C07F 5/067 (2013.01); C23C 16/08 (2013.01); C23C 16/12 (2013.01); C23C 16/20 (2013.01); C23C 16/45534 (2013.01); C23C 16/45553 (2013.01);
Abstract

A process including bringing a solid substrate in contact with a compound of general formula (I), (II), (III), or (IV) in the gaseous state where A is NRor OR with R being an alkyl group, an alkenyl group, an aryl group, or a silyl group,E is NR or O,n isor, m isor, andR' is hydrogen, an alkyl group, an alkenyl group, an aryl group, or a silyl group.


Find Patent Forward Citations

Loading…