The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2022
Filed:
Mar. 20, 2018
Applicant:
Kurita Water Industries Ltd., Tokyo, JP;
Inventors:
Hiroshi Morita, Tokyo, JP;
Nobuko Gan, Tokyo, JP;
Assignee:
KURITA WATER INDUSTRIES LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C02F 1/42 (2006.01); C02F 1/68 (2006.01); C02F 1/469 (2006.01); C02F 1/66 (2006.01); H01L 21/67 (2006.01); C02F 103/04 (2006.01); C02F 103/34 (2006.01);
U.S. Cl.
CPC ...
C02F 1/685 (2013.01); C02F 1/42 (2013.01); C02F 1/4695 (2013.01); C02F 1/66 (2013.01); H01L 21/67051 (2013.01); C02F 2103/04 (2013.01); C02F 2103/346 (2013.01); C02F 2209/04 (2013.01); C02F 2209/06 (2013.01); C02F 2303/18 (2013.01);
Abstract
A cleaning water supply device includes an ultrapure water line through which ultrapure water flows by a fixed amount, a production unit that produces cleaning water by adding a solute to the ultrapure water line by a fixed amount, a cleaning water line for causing the cleaning water to flow, cleaning machines to which the cleaning water is supplied from the cleaning water line, a solute removal unit into which excess cleaning water is introduced from the cleaning water line, and a collecting line for returning collected water from which the solute is removed to a tank and the like.