Process of treating a workpiece using a liquid jet guided laser beam

Abstract

The invention concerns a process for treating a workpiece, preferably for shaping a workpiece by ablating material, by a liquid jet guided laser beam. The process comprises the following steps: Production of a liquid jet by a nozzle; impinging the liquid jet on a reference surface allocated to the workpiece, whereby an intersection of the liquid jet with the reference surface defines a liquid jet-footprint; effecting a displacement between the liquid jet and the reference surface, whereby the liquid jet-footprint evolves to a trace along a trajectory associated with the trace during the time frame, wherein the trace covers a trace-area; irradiating the workpiece at least during part of the time frame with a laser beam coupled into the liquid jet, preferably for ablating material such that the trace has at least one overlap-area, wherein each of the at least one overlap-areas is defined by an associated common area of an associated second length-section of the trace and an associated first length-section of the trace and wherein the workpiece is irradiated by the laser beam along at least one of the length-sections. It concerns further a computerized numerical control (CNC) program for controlling a liquid jet guided laser machining device and a computer readable medium containing such a CNC program. Further, it contains a computer program for generating the above mentioned CNC program. Finally the invention concerns a liquid jet guided laser machining device to perform the above mentioned process.