The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2022
Filed:
Aug. 07, 2018
Kasuga Denki, Inc., Kawasaki, JP;
Satoshi Sugimura, Kawasaki, JP;
Satoru Ogiso, Kawasaki, JP;
Yukihira Sakurai, Kawasaki, JP;
Junya Yoshida, Kawasaki, JP;
Takao Morishita, Kawasaki, JP;
KASUGA DENKI, INC., Kanagawa, JP;
Abstract
Surface modification device forms a discharge area Ebetween a discharge electrodeand a counter electrode, supplies substitution gas to the discharge area E, and modifies the surface of the base material to be processed. The surface modification device comprises; a slit-shaped substitution gas passage; and cover membersthat form curtain passagesin spaces facing the discharge electrode. While the substitution gas is being supplied to the discharge area E, gas injected from the curtain passagesprevent the inflow of an entrained flow a and the outflows b, bof the substitution gas, thereby maintaining the concentration of substitution gas inside the discharge area E