The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2022
Filed:
Oct. 13, 2020
Applicants:
Hyundai Motor Company, Seoul, KR;
Kia Motors Corporation, Seoul, KR;
Inventors:
Il Seon Yoo, Hwaseong-si, KR;
Sang Hyeok Yang, Suwon-si, KR;
Hyun Soo Kim, Yongin-si, KR;
Dong Gu Kim, Hwaseong-si, KR;
Assignees:
HYUNDAI MOTOR COMPANY, Seoul, KR;
KIA MOTORS CORPORATION, Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 19/04 (2006.01); H04R 1/02 (2006.01);
U.S. Cl.
CPC ...
H04R 1/02 (2013.01); H04R 2201/003 (2013.01); H04R 2201/029 (2013.01);
Abstract
A MEMS microphone and a manufacturing method thereof are provided. The MEMS microphone includes: a substrate configured to have a through portion formed in a central portion thereof; a vibration membrane configured to have an uneven structure formed on the through portion of the substrate; and a fixed membrane provided on an upper position spaced apart from the vibration membrane by a predetermined distance.