The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2022
Filed:
May. 21, 2020
System apparatus and method for enhancing electrical clamping of substrates using photo-illumination
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Qin Chen, Santa Clara, CA (US);
Julian G. Blake, Gloucester, MA (US);
Michael W. Osborne, Clinton, MA (US);
Steven M. Anella, West Newbury, MA (US);
Jonathan D. Fischer, Lynn, MA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H05B 3/00 (2006.01); H05F 3/00 (2006.01); H01J 37/05 (2006.01); H01J 37/141 (2006.01); H05B 3/26 (2006.01); H01J 37/147 (2006.01); H02N 13/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); H01J 37/05 (2013.01); H01J 37/141 (2013.01); H01J 37/147 (2013.01); H01L 21/683 (2013.01); H02N 13/00 (2013.01); H05B 3/0047 (2013.01); H05B 3/26 (2013.01); H05F 3/00 (2013.01);
Abstract
A method may include providing a substrate on a clamp, and directing radiation from an illumination source to the substrate when the substrate is disposed on the clamp during substrate processing, wherein the radiation is characterized by a radiation energy, wherein at least a portion of the radiation energy is equal to or greater than 2.5 eV.