The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2022
Filed:
May. 01, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Jason M. Schaller, Austin, TX (US);
Robert Brent Vopat, Austin, TX (US);
Paul E. Pergande, Austin, TX (US);
Benjamin B. Riordon, Newburyport, MA (US);
David Blahnik, Round Rock, TX (US);
William T. Weaver, Austin, TX (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67017 (2013.01); H01L 21/6732 (2013.01); H01L 21/67109 (2013.01); H01L 21/68742 (2013.01);
Abstract
Wafer cassettes and methods of use that provide heating a cooling to a plurality of wafers to decrease time between wafer switching in a processing chamber. Wafers are supported on a wafer lift which can move all wafers together or on independent lift pins which can move individual wafers for heating and cooling.