The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 26, 2022

Filed:

Aug. 25, 2020
Applicant:

Hon Hai Precision Industry Co., Ltd., New Taipei, TW;

Inventor:

Li-Shing Hou, New Taipei, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/27 (2006.01); G01B 9/02 (2006.01); G01N 21/45 (2006.01); G02B 27/10 (2006.01); G02B 27/28 (2006.01); G01B 9/02015 (2022.01);
U.S. Cl.
CPC ...
G01N 21/276 (2013.01); G01B 9/02016 (2013.01); G01N 21/45 (2013.01); G02B 27/10 (2013.01); G02B 27/283 (2013.01);
Abstract

A measurement system includes a light source configured to emitting a source light, a detection platform configured to support a reference sample and a test sample; a light guiding element on an optical path of the source light; and a detector. The detection platform is configured to synchronously move the reference sample and the test sample on a same surface of the detection platform. The light guiding element is configured to divide the source light into a measurement light and a reference light and guide the measurement light to the test sample, and the reference light to the reference sample. The measurement light reflected by the test sample and the reference light reflected by the reference sample are combined as an interference light. The detector is configured to receive the interference light and obtain optical information of the test sample according to the interference light.


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