The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2022
Filed:
Sep. 27, 2019
Applicant:
United States of America As Represented BY the Administrator of Nasa, Washington, DC (US);
Inventors:
Assignee:
United States of America as represented by the Administrator of NASA, Washington, DC (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 5/08 (2022.01); G01J 5/22 (2006.01); H01L 39/24 (2006.01); H01L 39/14 (2006.01); H01L 39/12 (2006.01);
U.S. Cl.
CPC ...
G01J 5/0853 (2013.01); G01J 5/22 (2013.01); H01L 39/12 (2013.01); H01L 39/14 (2013.01); H01L 39/249 (2013.01);
Abstract
The present invention relates to a phononic-isolated Kinetic Inductance Detector (KID) and a method of fabrication thereof. The KID is a highly sensitive superconducting cryogenic detector which can be scaled to very large format arrays. The fabrication process of the KID of the present invention integrates a phononic crystal into a KID architecture. The phononic structures are designed to reduce the loss of recombination and athermal phonons, resulting in lower noise and higher sensitivity detectors.