The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 26, 2022

Filed:

Jun. 21, 2018
Applicant:

Osaka University, Suita, JP;

Inventors:

Hirotsugu Ogi, Suita, JP;

Tomoyuki Nonaka, Kyoto, JP;

Fumihito Kato, Kawaguchi, JP;

Assignee:

OSAKA UNIVERSITY, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01H 11/08 (2006.01); G01H 13/00 (2006.01); H01L 41/313 (2013.01); H01L 41/332 (2013.01); H01L 41/337 (2013.01); B81B 3/00 (2006.01); G01N 29/02 (2006.01); G01N 5/02 (2006.01);
U.S. Cl.
CPC ...
G01H 11/08 (2013.01); B81B 3/00 (2013.01); G01H 13/00 (2013.01); G01N 29/022 (2013.01); H01L 41/313 (2013.01); H01L 41/332 (2013.01); H01L 41/337 (2013.01); G01N 5/02 (2013.01); G01N 2291/014 (2013.01); G01N 2291/0255 (2013.01);
Abstract

A vibration detection element includes substrates, support members, and an oscillator, and may be used as a biosensor and/or for liquid inspection by analysis of oscillator resonant frequency change. The substrates have a space portion, and the support members protrude from the surfaces of the respective substrates into the space portion. The oscillator is disposed between the support members and is capable of vibrating in the space portion. The support members may each include multiple supports which prevent the oscillator from contacting the substrate surfaces. During manufacturing the oscillator may be transferred from the support member of a glass flow path substrate to a silicon flow path substrate by placement of the silicon substrate support member against the oscillator and subsequent removal of the adhesive from the glass substrate support member.


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