The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2022
Filed:
Jan. 18, 2018
Applicant:
Asm Assembly Systems Singapore Pte. Ltd., Singapore, SG;
Inventors:
Neil Short, Weymouth, GB;
Paddy Ash, Weymouth, GB;
Assignee:
ASM ASSEMBLY SYSTEMS SINGAPORE PTE. LTD., Singapore, SG;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B25B 11/00 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
B25B 11/005 (2013.01); H01L 21/6838 (2013.01); H01L 21/68721 (2013.01); H01L 21/68778 (2013.01); H01L 21/68785 (2013.01);
Abstract
Clamping of edges of flexible workpieces to a support surface is improved by creating a region of reduced pressure proximate the edges, by shaping air conduits so that they narrow in the edge regions.