The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2022
Filed:
Oct. 02, 2019
Applicant:
Samsung Display Co., Ltd., Yongin-si, KR;
Inventors:
Assignee:
Samsung Display Co., Ltd., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); H01L 21/67259 (2013.01);
Abstract
An electrostatic chuck and an electrostatic adsorption apparatus including the same are disclosed. The electrostatic chuck includes a base, a cushion layer on the base, an electrode layer on the cushion layer, and a dielectric layer on the electrode layer, the base, the cushion layer, the electrode layer, and the dielectric layer have through holes. The through holes each have a rectangular shape, and each corner region of the dielectric layer has a pair of the through holes, and the central axes of the pair of the through holes respectively intersect two adjacent sides of the dielectric layer at the respective corner region.