The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 19, 2022

Filed:

Feb. 27, 2017
Applicant:

Miraial Co., Ltd., Tokyo, JP;

Inventor:

Satoko Kai, Tokyo, JP;

Assignee:

MIRAIAL CO., LTD., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6732 (2013.01); H01L 21/67369 (2013.01); H01L 21/67373 (2013.01); H01L 21/67379 (2013.01); H01L 21/67383 (2013.01);
Abstract

A back side substrate support portionincludes a lower side inclined faceon which an end of a back face of a substrate W slides, and a substrate support portionthat is located above the lower side inclined faceand can support an edge portion of the substrate W. When a container main body opening portionis closed by a lid body, the edge portion of the substrate W slides on the lower side inclined faceand reaches the substrate support portion. At least a portion of the lower side inclined faceis configured from a second member that is different from a first member that configures the substrate support portion, and the second member has a lower maximum static friction coefficient and lower wear resistance than the first member.


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