The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2022
Filed:
Nov. 07, 2019
Tel Manufacturing and Engineering of America, Inc., Chaska, MN (US);
Kevin L. Siefering, Excelsior, MN (US);
TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC., Chaska, MN (US);
Abstract
The invention provides treatment systems useful to treat microelectronic workpieces with one or more treatment fluids dispensed onto a workpieces from one or more nozzle assemblies. The nozzle assemblies are easily moveable and positionable to change distance and/or angle of nozzle orientation relative to the substrates being treated. The nozzle assemblies are easily and quickly adjustable on demand. Adjustment may be manual or automated. The present invention is based at least in part upon coupling the nozzle directly or indirectly to a flexible bellows. As the bellows is flexed up or down or tilted, etc., the nozzle is moved in a corresponding manner. For example, the nozzle outlet can be moved closer or further away from the surface of the substrate being processed. The angle of the nozzle assembly, and hence the angle of the spray dispensed from the nozzle, with respect to the substrate can also be altered if desired.