The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2022
Filed:
Nov. 19, 2019
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Ekmini Anuja De Silva, Slingerlands, NY (US);
Jing Guo, Niskayuna, NY (US);
Jennifer Church, Troy, NY (US);
Dario Goldfarb, Dobbs Ferry, NY (US);
Assignee:
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0042 (2013.01); H01L 21/0274 (2013.01);
Abstract
A metal brush layer is provided. The metal brush layer includes a polymer backbone including at least one grafting unit, G, attached to the polymer backbone, and a plurality of metal-containing moieties, M, attached to the polymer backbone.