The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2022
Filed:
Jan. 23, 2017
Adeka Corporation, Tokyo, JP;
Junya Miyake, Tokyo, JP;
Yoshitomo Takeuchi, Tokyo, JP;
Naomi Sato, Tokyo, JP;
Kentaro Kimura, Tokyo, JP;
ADEKA CORPORATION, Tokyo, JP;
Abstract
Provided are: a thermal acid generator having a high acid generation temperature; and a resist composition using the same. The thermal acid generator is a sulfonic acid derivative compound represented by the following Formula (I): (wherein, Rrepresents an aliphatic hydrocarbon group having 1 to 18 carbon atoms or the like, or a group represented by the following Formula (II): (wherein, Yrepresents a single bond or an alkanediyl group having 1 to 4 carbon atoms; Rand Reach independently represent an alkanediyl group having 2 to 6 carbon atoms, or the like; Rrepresents a linear or branched alkyl group having 1 to 18 carbon atoms, or the like; a and b each represent 0 or 1; and either a or b is 1); Rto Reach independently represent a linear or branched alkyl group having 1 to 14 carbon atoms; the aliphatic hydrocarbon group or the like of Rhas no substituent or is substituted with a halogen atom or the like; and a methylene structure in the aliphatic hydrocarbon group or the like of Ris optionally substituted with —O— or the like).