The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 19, 2022

Filed:

Oct. 18, 2018
Applicant:

Robert Bosch Gmbh, Stuttgart, DE;

Inventors:

Helmut Grutzeck, Kusterdingen, DE;

Timo Schary, Aichtal-Neuenhaus, DE;

Joerg Muchow, Munich, DE;

Philip Kaupmann, Gundelfingen, DE;

Assignee:

Robert Bosch GmbH, Stuttgart, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); B81B 3/00 (2006.01); G02B 26/10 (2006.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0858 (2013.01); B81B 3/0021 (2013.01); G02B 26/101 (2013.01); H01L 41/09 (2013.01); B81B 2201/042 (2013.01); B81B 2203/0163 (2013.01);
Abstract

A micromechanical micromirror array including a frame including a cutout, a micromirror device suspended on the frame in the area of the cutout in a first plane, a first pivoting vane device suspended on the frame protruding into the area of the cutout, coupled to the micromirror device via a first spring device, a second pivoting vane device suspended on the frame protruding into the area of the cutout, coupled to the micromirror device via a second spring device, a first drive device for deflecting the first pivoting vane device along a first axis, perpendicular to the first plane, and a second drive device for the antiphase deflection of the second pivoting vane device along the first axis.


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