Resonant accelerometer

Abstract

Described herein are accelerometers, apparatus and systems incorporating accelerometers, and techniques for controlling sensing operations in an accelerometer. In certain embodiments, an accelerometer is a microelectromechanical systems (MEMS) device including a proof mass, an anchor, a spring between the proof mass and the anchor, a drive electrode, and a sense beam. The anchor is located in an opening defined by a body of the proof mass. The spring and the proof mass form a spring system suspended from the anchor. The sense beam is configured to oscillate at a particular resonance frequency that changes according to a force generated by movement of the proof mass in response to acceleration. In some embodiments, a support structure couples the anchor to the spring and operates as a stress decoupling area that prevents or limits propagation of stress from the anchor to the sense beam and the spring system.