The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2022
Filed:
Aug. 20, 2019
Samsung Display Co., Ltd., Yongin-si, KR;
Youngmin Moon, Yongin-si, KR;
Sungsoon Im, Yongin-si, KR;
Jungwoo Ko, Yongin-si, KR;
Sangmin Lee, Yongin-si, KR;
Youngchul Lee, Yongin-si, KR;
Kyuhwan Hwang, Yongin-si, KR;
Samsung Display Co., Ltd., Yongin-si, KR;
Abstract
A mask repairing apparatus may include a stage, a stereoscopic imaging unit to measure a stereoscopic image of a mask on the stage, a control unit to compare the stereoscopic image with a normal image of the mask and to produce a defect image of the mask, and a laser unit to irradiate a laser beam onto a deficient part of the mask, under control of the control unit. The control unit may control the laser unit, based on the defect image, such that the laser beam is sequentially irradiated onto m multiple layers of the deficient part while repeatedly moving in a first direction and a second direction crossing each other.