The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2022
Filed:
Jul. 31, 2018
Applicant:
Ferrotec Material Technologies Corporation, Tokyo, JP;
Inventors:
Assignee:
FERROTEC MATERIAL TECHNOLOGIES CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C04B 35/10 (2006.01); C04B 35/626 (2006.01); C04B 35/64 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C04B 35/10 (2013.01); C04B 35/62695 (2013.01); C04B 35/64 (2013.01); H01L 21/67069 (2013.01); C04B 2235/3201 (2013.01); C04B 2235/3206 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3255 (2013.01); C04B 2235/656 (2013.01); C04B 2235/9669 (2013.01);
Abstract
An alumina sintered body comprising 0.01 to 1.0 mass % of one or more types selected from Ta, Nb, and V in terms of oxide thereof. The alumina sintered body may further comprise 0.01 to 1.0 mass % of Mg in terms of Mg oxide. It is particularly preferable that the alumina sintered body has an alumina purity of 99% or more. An alumina sintered body having low dielectric loss as compared with that in related art can therefore be produced at low cost.