The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2022
Filed:
Sep. 27, 2019
Lynred, Palaiseau, FR;
Universite Paris-saclay, Saint-Aubin, FR;
Centre National DE LA Recherche Scientifique, Paris, FR;
Sylvain Lemettre, Massy, FR;
David Bunel, Moirans, FR;
Johan Moulin, Antony, FR;
Alain Bosseboeuf, Massy, FR;
LYNRED, Palaiseau, FR;
UNIVERSITE PARIS-SACLAY CENTRE NATIONAL DE LA RECHERCHE, Saint-Aubin, FR;
SCIENTIFIQUE (CNRS), Paris, FR;
Abstract
A hermetic housing is disclosed () for an optoelectronic component () or a MEMS device configured to form an enclosure () within which a low pressure or vacuum prevails. The hermetic housing includes: an optical window () transparent for at least one wavelength of interest (λ); and a layer of a getter material () configured to capture gases present in said enclosure and deposited on the optical window opposite the enclosure. This layer of getter material has a thickness (e_t), greater than 60 nanometers, and a porosity (P) in the range from 10 to 70% to satisfy the following relation: (1−P)*e_t<λ/2πk with λ corresponding to the at least one wavelength of interest, and k corresponding to the extinction coefficient of the material of the layer of getter material for the at least one wavelength of interest of the optical window.