The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 12, 2022

Filed:

Jan. 09, 2020
Applicant:

Qualcomm Incorporated, San Diego, CA (US);

Inventors:

John Jianhong Zhu, San Diego, CA (US);

Stanley Seungchul Song, San Diego, CA (US);

Kern Rim, San Diego, CA (US);

Assignee:

QUALCOMM Incorporated, San Diego, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/528 (2006.01); H01L 23/522 (2006.01); H01L 23/532 (2006.01); H01L 21/768 (2006.01); H01L 23/535 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5286 (2013.01); H01L 21/7684 (2013.01); H01L 21/76805 (2013.01); H01L 21/76847 (2013.01); H01L 21/76877 (2013.01); H01L 21/76895 (2013.01); H01L 23/5226 (2013.01); H01L 23/535 (2013.01); H01L 23/53209 (2013.01); H01L 23/53238 (2013.01); H01L 23/53252 (2013.01); H01L 23/53266 (2013.01);
Abstract

Certain aspects of the present disclosure generally relate to integration of a hybrid conductor material in power rails of a semiconductor device. An example semiconductor device generally includes an active electrical device and a power rail. The power rail is electrically coupled to the active electrical device, disposed above the active electrical device, and embedded in at least one dielectric layer. The power rail includes a first conductive layer, a barrier layer, and a second conductive layer. In certain cases, copper may be used as conductive material for the second conductive layer. The barrier layer is disposed between the first conductive layer and the second conductive layer.


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