The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 12, 2022

Filed:

Dec. 12, 2019
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Yuichiro Morikuni, Utsunomiya, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); H01L 21/67248 (2013.01); H01L 21/67265 (2013.01); H01L 21/681 (2013.01); H01L 21/682 (2013.01); H01L 21/68707 (2013.01);
Abstract

A conveyance apparatus comprises a first movable device to move while holding an object, a second movable device to move while holding the object and transfer the object to the first movable device, and a controller to control the first and second movable devices. The second movable device includes a guide member and a hand arranged so as to be capable of reciprocally moving along the guide member while holding the object. The controller estimates, based on a driving history of the second movable device, a thermal deformation amount of the guide member corresponding to the reciprocal movement of the hand along the guide member, and corrects, based on the estimated thermal deformation amount, a drive command value used to move the first movable device to a position to receive the object from the second movable device.


Find Patent Forward Citations

Morikuni, Yuichiro. (2022). Conveyance apparatus, substrate processing apparatus, and method of manufacturing article (U.S. Patent No. 11302551). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11302551

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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