Defect inspection device, defect inspection method, and computer readable recording medium

Abstract

An image generating part generating feature extraction images by applying an identification part, which has completed learning, that has executed learning in advance to extract features using learning image data to an inspection image, an inspection part specifying an area corresponding to a defect on the basis of judgment parameters for judging presence/absence of a defect in the inspection target object and a binary image generated on the basis of the feature extraction images, and a setting part calculating an image score based on a density of a color of pixels of a setting image using the setting image that is the binary image in which an area corresponding to the defect is specified and updating the judgment parameters such that a difference between an image score of the inside of the area and an image score of the outside of the area becomes relatively large are included.