The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2022
Filed:
Sep. 29, 2014
Agilent Technologies, Inc., Loveland, CO (US);
Charles Hoke, Menlo Park, CA (US);
Varun Raghunathan, Santa Clara, CA (US);
Agilent Technologies, Inc., Santa Clara, CA (US);
Abstract
An apparatus and method for generating a mid-infrared region image of a specimen are disclosed. The apparatus includes a mid-infrared region laser that generates a first light beam, and a stage adapted to carry a specimen to be scanned. An optical assembly focuses the first light beam to a point on the specimen. A first light detector measures a first intensity of light leaving the point on the specimen. A stage actuator assembly causes the specimen to move relative to the point in two dimensions. A controller forms a mid-infrared region image from the first intensity. The image can be based on reflected or transmitted light. The maximum size of the imaged area is determined by a scanning assembly that moves in a first direction relative to the stage, the stage moving in a direction orthogonal to the first direction.