The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2022
Filed:
Apr. 21, 2021
Zhongwei Chen, Los Altos Hills, CA (US);
Xiaoming Chen, Sunnyvale, CA (US);
Daniel Tang, Fremont, CA (US);
Liang-fu Fan, Fremont, CA (US);
Zhongwei Chen, Los Altos Hills, CA (US);
Xiaoming Chen, Sunnyvale, CA (US);
Daniel Tang, Fremont, CA (US);
Liang-Fu Fan, Fremont, CA (US);
BORRIES PTE. LTD., Singapore, SG;
Abstract
The present invention provides an apparatus of charged-particle beam such as an electron microscope with co-condensers. A source of charged particles is configured to emit a beam of charged particles, and the co-condensers including two or more magnetic condensers are configured to coherently focus the beam to a single crossover spot. The invention exhibits numerous technical merits such as continuous image resolution tuning, and automatic switching between multiple resolutions, among others.