The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 05, 2022

Filed:

Apr. 18, 2018
Applicant:

Okinawa Institute of Science and Technology School Corporation, Okinawa, JP;

Inventors:

Nikhil Bhalla, Okinawa, JP;

Amy Shen Fried, Okinawa, JP;

Kang-Yu Chu, Okinawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/75 (2006.01); G01N 33/543 (2006.01); C03C 17/09 (2006.01); G01N 21/552 (2014.01); G01N 21/41 (2006.01);
U.S. Cl.
CPC ...
G01N 33/54373 (2013.01); C03C 17/09 (2013.01); G01N 21/554 (2013.01); C03C 2217/255 (2013.01); C03C 2218/151 (2013.01); C03C 2218/33 (2013.01); G01N 21/41 (2013.01);
Abstract

A method for making a plasmonic mushroom array includes: forming a plurality of metal nano-islands each having nanometer-range dimensions on a surface of a glass substrate; and subjecting to the glass substrate having the plurality of metal nano-islands formed thereon to reactive ion etching such that the plurality of metal nano-islands are converted to a plurality of mushroom-shaped structures each having a metal cap supported by a pillar made of a material of the glass substrate and each having dimensions smaller than the dimensions of the nano-islands, the plurality of mushroom-shaped structures being arranged in a substantially regular pattern with intervals smaller than average intervals between the nano-islands, thereby forming the plurality of nano-scale mushroom-shaped structures on the glass substrate that can exhibit localized surface plasmon resonance.


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