The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 05, 2022

Filed:

Aug. 04, 2020
Applicant:

Keyence Corporation, Osaka, JP;

Inventor:

Yoshitaka Tsuchida, Osaka, JP;

Assignee:

KEYENCE CORPORATION, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/02 (2006.01); G01B 11/24 (2006.01); G01S 17/48 (2006.01); G01S 7/481 (2006.01);
U.S. Cl.
CPC ...
G01B 11/026 (2013.01); G01B 11/24 (2013.01); G01S 7/4816 (2013.01); G01S 7/4817 (2013.01); G01S 17/48 (2013.01);
Abstract

Reflected light from the measurement object is received by a plurality of pixel columns arranged in an X2 direction in a light receiving unit, and a plurality of light receiving amount distributions is output. One or a plurality of peak candidate positions of light receiving amounts in a Z2 direction is detected by a peak detection unitfor each pixel column based on the plurality of light receiving amount distributions. A peak position to be adopted to a profile is selected from the peak candidate positions detected for each pixel column based on a relative positional relationship with a peak position of another pixel column adjacent to the pixel column, and profile data indicating the profile is generated by the profile generation unitbased on the selected peak position.


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