The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 05, 2022

Filed:

Sep. 06, 2018
Applicants:

Beijing Boe Display Technology Co., Ltd., Beijing, CN;

Boe Technology Group Co., Ltd., Beijing, CN;

Inventors:

Jiyu Wan, Beijing, CN;

Dong Wang, Beijing, CN;

Yongzhi Song, Beijing, CN;

Jingjing Jiang, Beijing, CN;

Pengyu Qi, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/28 (2006.01); C23C 14/35 (2006.01); C23C 14/34 (2006.01); C03C 25/226 (2018.01);
U.S. Cl.
CPC ...
C23C 14/28 (2013.01); C03C 25/226 (2013.01); C03C 2218/154 (2013.01); C23C 14/3421 (2013.01); C23C 14/3485 (2013.01); C23C 14/357 (2013.01);
Abstract

The present disclosure relates to the field of vapor deposition technologies, and discloses a vapor deposition method. The vapor deposition method includes: applying an exciting acoustic wave to the target, such that particles in a predetermined location of the target break away from the target and adhere to a predetermined region of the substrate when an energy of the particles is higher than an energy required for the particles to break away from the target. By using the vapor deposition method, losses of vapor deposition materials may be avoided, utilization of the vapor deposition materials may be increased, and thus costs may be reduced.


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