Fingerprint identification module, manufacturing method and driving method thereof, and display device

Abstract

A fingerprint identification module, a manufacturing method and driving method thereof, and a display device. The fingerprint identification module includes: a driving backplate, including a substrate, identification circuits on the substrate, the identification circuits having a first electrode pad, a second electrode pad; acoustic units including: a first electrode; a piezoelectric film layer positioned on the side, close to the driving backplate, of the first electrode; a second electrode positioned on the side, close to the driving backplate, of the piezoelectric film layer; a first lead-out terminal electrically connected with the first electrode; a second lead-out terminal electrically connected with the second electrode; cavities being in one-to-one correspondence to the acoustic units, the cavities positioned between the second electrodes and the substrate, and one side face, away from the substrate, of cavity being defined by at least one side face, close to the substrate, of the second electrode.