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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11287551 B1

PDFFull Text
Date of Patent:
Mar. 29, 2022

Filed:

Sep. 05, 2017

Method of forming nano-patterns on a substrate

Applicant:

Agency for Science, Technology and Researchy, Singapore, SG;

Inventors:

Kwang Wei Joel Yang, Singapore, SG;

Zhaogang Dong, Singapore, SG;

Ramon Paniagua-Dominguez, Singapore, SG;

Arseniy Kuznetsov, Singapore, SG;

Yefeng Yu, Singapore, SG;

Assignee:

AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH, Singapore, SG;

Attorney:

Womble Bond Dickinson (US) LLP

Primary Examiner:

Thong Q Nguyen

Int. Cl.
CPC ...
G02B 1/10 (2015.01); G02B 1/118 (2015.01); B82Y 40/00 (2011.01); B81C 1/00 (2006.01); G02B 1/115 (2015.01); G03F 7/00 (2006.01); H01L 21/027 (2006.01); H01L 21/033 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
G02B 1/118 (2013.01); B81C 1/00031 (2013.01); B81C 1/00388 (2013.01); B82Y 40/00 (2013.01); G02B 1/115 (2013.01); G03F 7/0002 (2013.01); H01L 21/0271 (2013.01); H01L 21/0337 (2013.01); H01L 21/31144 (2013.01); B81C 2201/0149 (2013.01);
Abstract

This application relates to a method of forming nano-patterns on a substrate comprising the step of forming a plurality of nanostructures on a dielectric substrate, wherein the nanostructures are dimensioned or spaced apart from each other by a scaling factor of the dielectric substrate with reference to a silicon substrate.

Find Patent Forward Citations

Yang, Kwang Wei Joel. (2022). Method of forming nano-patterns on a substrate (U.S. Patent No. 11287551). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11287551

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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