The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 29, 2022

Filed:

Feb. 19, 2020
Applicant:

Invensense, Inc., San Jose, CA (US);

Inventors:

Sriraman Dakshinamurthy, San Jose, CA (US);

Vadim Tsinker, Belmont, CA (US);

Matthew Julian Thompson, Beaverton, OR (US);

Assignee:

INVENSENSE, INC., San Jose, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/13 (2006.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
G01P 15/13 (2013.01); G01P 15/0802 (2013.01); B81B 2201/0235 (2013.01); G01P 2015/084 (2013.01);
Abstract

A MEMS accelerometer includes a suspended spring-mass system that has a frequency response to accelerations experienced over a range of frequencies. The components of the suspended spring-mass system such as the proof masses respond to acceleration in a substantially uniform manner at frequencies that fall within a designed bandwidth for the MEMS accelerometer. Digital compensation circuitry compensates for motion of the proof masses outside of the designed bandwidth, such that the functional bandwidth of the MEMS accelerometer is significantly greater than the designed bandwidth.


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