The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 29, 2022

Filed:

Dec. 18, 2020
Applicant:

V5 Technologies Co., Ltd., Hsinchu, TW;

Inventors:

Kuo-Ming Tseng, Hsinchu, TW;

Yueh-Heng Lee, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/95 (2006.01); G01N 21/88 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9501 (2013.01); G01N 21/8803 (2013.01);
Abstract

A method for inspecting a semiconductor element includes steps of: a) providing an inspection apparatus including a supporting unit that includes a central seat and a plurality of positioning plates, and a camera unit that includes a first image capture device; b) positioning the semiconductor element onto the positioning plates; c) capturing a first bottom image of the semiconductor element; d) generating relative movement between the semiconductor element and the positioning plates; e) capturing a second bottom image of the semiconductor element; and f) synthesizing the first bottom image and the second bottom image to obtain a complete bottom image of the semiconductor element.


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