The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2022
Filed:
Feb. 06, 2018
Applicant:
Foundation of Soongsil University Industry Cooperation, Seoul, KR;
Inventors:
Joo Yong Kim, Seoul, KR;
Min Ki Choi, Incheon, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 13/02 (2006.01); H01L 41/113 (2006.01);
U.S. Cl.
CPC ...
G01L 13/02 (2013.01); H01L 41/1132 (2013.01);
Abstract
A pressure sensor having unevenness and a manufacturing method therefor are disclosed. The disclosed pressure sensor senses pressure in a vertical direction and includes a first pressure sensor unit and a second pressure sensor unit, wherein the first pressure sensor unit and the second pressure sensor unit are stacked, and unevenness is formed on the upper surface of the first pressure sensor unit and on the lower surface of the second pressure sensor unit.