The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2022
Filed:
Jun. 19, 2019
University of Maryland, College Park, College Park, MD (US);
National Institute of Standards and Technology, Gaithersburg, MD (US);
Stephen Eckel, Rockville, MD (US);
James Fedchak, Washington, DC (US);
Thomas Purdy, Gaithersburg, MD (US);
Robinjeet Singh, Gaithersburg, MD (US);
University of Maryland, College Park, College Park, MD (US);
Government of the USA, as represented by the Secretary of Commerce, National Institute of Standards and Technology, Gaithersburg, MD (US);
Abstract
An optomechanical pressure-measurement system measures pressure in the range of 10Pa-10Pa by measuring various properties of a vibrational mode of an ultra-thin membrane member. With independent measurements of the thickness and density of the membrane, in addition to the measured vibration mode properties, the system can operate as a primary pressure sensor. The membrane member is mounted on a vibration-isolated mount and is excited by a drive force. A laser beam impinges on the excited membrane, and an optical phase detector detects the amplitude of the oscillations, as well as parameters of the laser beam affected by the membrane vibration. In one embodiment, a mechanical damping is computed based on the amplitude or frequency shift (depending on the pressure range), and the pressure based on the ring-down time of the membrane vibration mode.