The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 29, 2022

Filed:

May. 14, 2018
Applicant:

Hamamatsu Photonics K.k., Hamamatsu, JP;

Inventors:

Yoshihisa Warashina, Hamamatsu, JP;

Kei Tabata, Hamamatsu, JP;

Assignee:

HAMAMATSU PHOTONICS K.K., Hamamatsu, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/26 (2006.01); G02B 5/28 (2006.01); G02B 26/00 (2006.01); G01J 3/06 (2006.01); G01J 3/28 (2006.01); G02B 26/08 (2006.01); G02B 6/293 (2006.01);
U.S. Cl.
CPC ...
G01J 3/26 (2013.01); G01J 3/06 (2013.01); G01J 3/28 (2013.01); G02B 5/28 (2013.01); G02B 26/001 (2013.01); G02B 26/085 (2013.01); G01J 2003/066 (2013.01); G02B 6/29358 (2013.01);
Abstract

Provided is a filter controlling expression derivation method including: preparing a Fabry-Perot interference filter of which distance between a fixed mirror and a movable mirror is controlled by balancing an electrostatic force and an elastic force; deriving a relational expression between a deflection amount and an elasticity index in which the elasticity index of the movable mirror is described as a quadratic or higher-order polynomial with the deflection amount of the movable mirror as a variable by performing predetermined measurement; and deriving a relational expression between a transmission wavelength of light transmitted through the Fabry-Perot interference filter and the voltage as a filter controlling expression based on the relational expression between the deflection amount and the elasticity index and a relational expression between the electrostatic force and the elastic force.


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