The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2022
Filed:
Nov. 23, 2017
Applicant:
Leybold Gmbh, Cologne, DE;
Inventors:
Max Pelikan, Bornheim, DE;
Raffaello Ghislotti, Mozzo, IT;
Dirk Schiller, Hürth, DE;
Daniel Reinhard, Cologne, DE;
Assignee:
Leybold GmbH, Cologne, DE;
Primary Examiner:
Int. Cl.
CPC ...
F04C 25/02 (2006.01); F04C 27/02 (2006.01); F04C 28/02 (2006.01); F04C 28/08 (2006.01); F04C 23/00 (2006.01); F04B 37/14 (2006.01); F04B 41/06 (2006.01); F04B 49/06 (2006.01); F04D 17/16 (2006.01); F04D 19/04 (2006.01);
U.S. Cl.
CPC ...
F04C 25/02 (2013.01); F04B 37/14 (2013.01); F04B 41/06 (2013.01); F04C 23/006 (2013.01); F04C 27/02 (2013.01); F04C 28/02 (2013.01); F04C 28/08 (2013.01); F04B 49/065 (2013.01); F04C 23/008 (2013.01); F04D 17/168 (2013.01); F04D 19/046 (2013.01);
Abstract
A vacuum pump system is provided that includes a main vacuum pump that is connected to a chamber that is to be evacuated. An auxiliary pump is connected to an outlet of the main vacuum pump. Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device as a function of a predetermined control variable. Additionally, a method for controlling the vacuum pump system.