The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2022
Filed:
Aug. 10, 2020
Tsinghua University, Beijing, CN;
Hon Hai Precision Industry Co., Ltd., New Taipei, TW;
Tsinghua University, Beijing, CN;
HON HAI PRECISION INDUSTRY CO., LTD., New Taipei, TW;
Abstract
A method for making a carbon nanotube array includes placing a gas diffusing unit defining an outlet in a chamber including a first inlet and a second inlet. A gas transporting pipe haves a first end and a second end opposite to the first end, the second end is connected to the gas diffusing unit, and the first end passes through the second inlet and extends out of the chamber. A growth substrate defining a through hole covers the outlet. A carbon source gas and a protective gas is supplied to the chamber from the first inlet, to grow a carbon nanotube array including multiple carbon nanotubes. Each carbon nanotube has a bottom end. Then the carbon source gas is stopped supplying, and an oxygen containing gas is supplied to the gas transporting pipe, to oxidize the bottom end.