The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 29, 2022

Filed:

May. 20, 2019
Applicant:

Leibniz-institut Fuer Festkoerper-und Werkstoffforschung Dresden E.v., Dresden, DE;

Inventors:

Andreas Winkler, Dresden, DE;

Christine Henze, Dresden, DE;

Thomas Gemming, Dresden, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01L 3/00 (2006.01); H01L 41/332 (2013.01); G01N 29/02 (2006.01); B06B 1/06 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
B01L 3/502707 (2013.01); B01L 3/50273 (2013.01); B01L 3/502761 (2013.01); B06B 1/0688 (2013.01); G01N 29/022 (2013.01); H01L 41/332 (2013.01); B01L 2200/0652 (2013.01); B01L 2200/12 (2013.01); B01L 2300/0851 (2013.01); B01L 2300/0858 (2013.01); B01L 2300/12 (2013.01); B01L 2300/16 (2013.01); B01L 2400/0436 (2013.01); B06B 2201/77 (2013.01); G03F 7/2004 (2013.01);
Abstract

Acoustofluidic components in which at least one microfluidic element and at least one acoustic transducer element are arranged on a piezoelectric substrate and/or on a piezoelectric layer on a non-piezoelectric substrate and/or on a non-piezoelectric substrate on a piezoelectric layer. The at least one microfluidic element is arranged in at least one propagation direction of an acoustic wave excited by the acoustic transducer element and the at least one microfluidic element prepared at least partially by lamination and photolithographic structuring comprises a base, walls and a top. At least the top is prepared by lamination and photolithographic structuring, and the microfluidic element has top thicknesses of 0.01 to 10 times the wavelength of the acoustic wave excited by the acoustic transducer element.


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