The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2022
Filed:
Sep. 04, 2019
Applicant:
Kioxia Corporation, Minato-ku, JP;
Inventors:
Assignee:
KIOXIA CORPORATION, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/66 (2006.01); B41J 2/14 (2006.01); H01L 21/027 (2006.01); B05C 5/02 (2006.01); B41J 2/005 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6715 (2013.01); B05C 5/0262 (2013.01); B41J 2/005 (2013.01); B41J 2/14201 (2013.01); H01L 21/0273 (2013.01); H01L 22/20 (2013.01);
Abstract
According to one embodiment, a liquid delivery member is provided which is to be arranged at a predetermined distance from a processing object, and which is configured to deliver a liquid from a slit while the liquid delivery member and the processing object are caused to make relative displacement therebetween in a first direction. The liquid delivery member includes a delivery amount adjustment part provided on a face that forms the slit, extending in a second direction orthogonal to the first direction, and configured to adjust a delivery amount of the liquid.