The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2022
Filed:
Jan. 11, 2019
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventor:
Jong Seok Seo, Cheonan-si, KR;
Assignee:
SEMES CO., LTD., Chungcheongnam-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); F27B 5/18 (2006.01); H01L 21/67 (2006.01); F27B 5/14 (2006.01); F27B 17/00 (2006.01); G03F 7/20 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67109 (2013.01); F27B 5/14 (2013.01); F27B 17/0025 (2013.01); G03F 7/70991 (2013.01); H01L 21/67103 (2013.01); H01L 21/67178 (2013.01); H01L 21/67225 (2013.01); H01L 21/67248 (2013.01); H01L 21/6838 (2013.01); H01L 21/6875 (2013.01);
Abstract
An apparatus for treating a substrate are provided. The apparatus includes a chamber having a treatment space therein, a substrate support unit to support the substrate in the treatment space, and a heater unit to heat the substrate supported by the substrate support unit. The substrate support unit includes a support plate having a seating surface, a support protrusion provided to protrude from the seating plate and to directly support the substrate, and a sensor provided to the support protrusion to measure a temperature of the substrate.