The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2022
Filed:
Aug. 21, 2018
Samsung Electronics Co., Ltd., Suwon-si, KR;
Nuo Xu, Milpitas, CA (US);
Fan Chen, Milpitas, CA (US);
Weiyi Qi, San Jose, CA (US);
Jongchol Kim, Seong-Nam Si, KR;
Jing Wang, San Jose, CA (US);
Yang Lu, San Jose, CA (US);
Woosung Choi, Milpitas, CA (US);
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
A system for reconstructing wafer maps of semiconductor wafers includes: a processor; and memory having instructions stored thereon that, when executed by the processor, cause the processor to: receive test data of a wafer at sparse sampling locations of the wafer, the sparse sampling locations being selected based on a probing mask; and compute a reconstructed wafer map by performing compressed sensing with Zernike polynomials on the test data at sparse locations of the wafer.