The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 15, 2022

Filed:

Apr. 21, 2020
Applicant:

Renesas Electronics Corporation, Tokyo, JP;

Inventor:

Yoshiyuki Kawashima, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/028 (2006.01); H01L 27/088 (2006.01); H01L 27/11556 (2017.01); H01L 27/11582 (2017.01); G11C 5/06 (2006.01); G11C 5/02 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11556 (2013.01); G11C 5/025 (2013.01); G11C 5/06 (2013.01); H01L 27/0886 (2013.01); H01L 27/11582 (2013.01);
Abstract

Fins lined up in a Y direction, a control gate electrode and a memory gate electrode each extending in the Y direction so as to straddle the fins, a plurality of first plugs electrically connected with a drain region formed in each of the fins, and a plurality of second plugs electrically connected with a source region formed in each of the fins are formed. Here, a N-th plug of the plurality of first plugs lined up in the Y direction is coupled with each of (2N−1)-th and 2N-th fins in the Y direction. Also, a N-th plug of the plurality of second plugs lined up in the Y direction is coupled with each of 2N-th and (2N+1)-th fins in the Y direction.


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