The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 15, 2022

Filed:

Nov. 18, 2020
Applicant:

Hitachi High-tech Corporation, Tokyo, JP;

Inventors:

Yuki Tomizawa, Tokyo, JP;

Kazunari Asao, Tokyo, JP;

Kazuyuki Hirao, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); H01J 37/21 (2006.01); H01J 37/28 (2006.01); G06T 5/00 (2006.01); H01J 37/285 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); G06T 5/008 (2013.01); H01J 37/21 (2013.01); H01J 37/28 (2013.01); H01J 37/285 (2013.01); G06T 2200/24 (2013.01); G06T 2207/10061 (2013.01); H01J 2237/2806 (2013.01);
Abstract

There are provided: a method for image adjustment using a charged particle beam device, and a charged particle beam system, capable of appropriately adjusting a contrast and brightness as well as a focus for a measurement region present in a deep portion of a sample even when a depth of the measurement region is unknown. A method for image adjustment performed by a computer system controlling a charged particle beam device includes: by the computer system, specifying a measurement region from a captured image of a sample; performing centering processing based on the specified measurement region; extracting the measurement region in a field of view that has undergone the centering processing or the image that has undergone the centering processing; adjusting a contrast and brightness for the extracted measurement region; and adjusting a focus for the measurement region in which the contrast and brightness have been adjusted.


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