The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2022
Filed:
Oct. 05, 2017
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Dermot Cantwell, Sunnyvale, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/62 (2006.01); G05B 23/02 (2006.01); G05B 19/418 (2006.01); G01R 31/28 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G06K 9/6284 (2013.01); G01R 31/2894 (2013.01); G05B 19/41875 (2013.01); G05B 23/0221 (2013.01); G05B 23/0281 (2013.01); H01L 22/20 (2013.01);
Abstract
Embodiments disclosed herein generally relate to a method, system, and non-transitory computer readable medium for classifying an outlier in time series data collected by a sensor positioned in a substrate processing chamber. The client device receives time series data from the sensor positioned in the substrate processing chamber. The client device converts the time series data to a bounded uniform signal. The client device identifies signal sub-segments that do not match an expected behavior. The client device classifies the identified sub-segments that do not match the expected behavior.